Spectropur Regulator

Spectropur - Product features

The product range is specially adapted to applications in the semi conductor industry and ranges from components like pressure regulators and valves up to complete panels, VMP’s, VMB’s and gas cabinets. Spectropur products are made from remelted stainless steel with electro-polished surfaces. The pressure regulators and valves are built with Hastelloy diaphragms. The dead space optimised components are sealed metal to metal using the VCR technology. Patented purging devices secure the required gas purity.

Applications

Spectropur-products can be used for a huge variety of applications as:

• Semiconductor production
• Research (R&D)
• Optical fibre technology
• Laser applications
• ... and many other applications with the highest demands in terms of  purity, particles, automation and safety.

Technical data

• Inlet pressure: max. 200 bar
• Outlet pressure: 1,5 bar - 10 bar
• Max. flow: 100 Nm³/h
• Leak rate: 1 x 10-9 mbar.l/s