Mega Valve & Fittings Sdn Bhd
5, Jalan Sungai Rasau E32/E,
Taman Perindustrian Berjaya,
40150 Shah Alam,
Selangor, Malaysia.
+603-51315435
+603-55251956MP1
Spectropur Regulator --- Pressure Control Planels ---
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Product features
- Pressure control panels for semiconductor gases from quality 6.0
- Waste gas valve
- Manual (pneumatic) process gas (EMO-) valve
- Pre-filter
- Pressure regulator
- Burst disc
- Filter for particle-free process gas supply
- All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE
- 100 % helium-leak-tested
- Assembly in cleanroom class ISO 5.0
| Technical data | ||
|---|---|---|
|
Materials Body: Diaphragm: Other gas-wetted parts: valve seat and stem: |
stainless steel 1.4404 ESU (SS 316L remelted) Hastelloy C276 stainless steel 1.4404 ESU (SS 316L remelted) PCTFE |
|
|
Surface roughness optional: |
Ra ≤ 0,25 µm Ra ≤ 0,18 µm |
|
|
Leak rate to atmosphere: via seat: |
< 1 x 10-9 mbar l/s He < 1 x 10-6 mbar l/s He |
|
| Cv-value | 0,24 (kv = 0,2) | |
| Temperature range | -20°C to +70°C | |