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Mega Valve & Fittings Sdn Bhd
5, Jalan Sungai Rasau E32/E,
Taman Perindustrian Berjaya,
40150 Shah Alam,
Selangor, Malaysia.
 +6016-3350 096

 +6016-3370 096
 +6015-9600 3096

MP1

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MP1



Product features

  • Pressure control panels for semiconductor gases  from quality 6.0
  • Waste gas valve
  • Manual (pneumatic) process gas (EMO-) valve
  • Pre-filter
  • Pressure regulator
  • Burst disc
  • Filter for particle-free process gas supply
  • All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE
  • 100 % helium-leak-tested
  • Assembly in cleanroom class ISO 5.0

Technical data
Materials
Body:

Diaphragm:
Other gas-wetted parts:

valve seat and stem:

stainless steel 1.4404 ESU (SS 316L remelted)
Hastelloy C276

stainless steel 1.4404 ESU (SS 316L remelted)
PCTFE
 
Surface roughness
optional:
Ra ≤ 0,25 µm
Ra ≤ 0,18 µm
Leak rate
to atmosphere:
via seat:

< 1 x 10-9 mbar l/s He
< 1 x 10-6 mbar l/s He
Cv-value 0,24 (kv = 0,2)
Temperature range -20°C to +70°C